SuperFab Cleanroom

A new world-class nanofabrication facility, housed in a £2 million ISO Class 5 cleanroom designed and built by Clean Room Construction, will open in April.

The official launch of the SuperFab nanofabrication facility at Royal Holloway, University of London in Surrey will take place on 2nd April.

Richard Rowe, CRC's Project Director, said: "Clean Room Construction is extremely proud to have been chosen to work directly with the university to design and build this state-of-the-art cleanroom facility which is now home to the UK Centre for Superconducting and Hybrid Quantum Systems.

"The 315m² cleanroom has been engineered to incorporate a photolithography area, close control e-beam area to +/- 0.1 degrees Celsius control band and an anti-vibration foundation pad for process equipment. The leading-edge facility is set to play a pivotal role in the development and small-scale industrial production of the next generation of superconducting quantum devices."

The 12-month project also included an anti-vibration foundation pad for process equipment and energy-efficient fume hoods and HVAC. CRC was responsible for liaising directly with the university's key process equipment suppliers throughout the design and construction project and providing assistance to the client with process equipment migration. CRC also handled the commissioning and validation of the facility.

Professor David Delpy, Chair of the UK National Quantum Technologies Programme Strategic Advisory Board, will formally open the new facility. More information about the opening is available by emailing:

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